Canonical: https://ownershiptrace.com/13f/companies/1010

# Who owns ENTEGRIS INC (ENTG)? Elite investor 13F holders

13 tracked elite investors reported holding ENTEGRIS INC as of 2026-06-30, including Cantillon Capital Management, Mairs & Power Funds, Durable Capital Partners, Duquesne Family Office, GMO. Who bought, trimmed or exited each quarter, with links to the original SEC 13F filings.

13 tracked investors currently reported holding · Latest report period: 2026-06-30 · Materials · Materials

Entegris, Inc. provides advanced materials and process solutions for the semiconductor and other high-technology industries in North America, Taiwan, South Korea, Japan, China, Europe, and Southeast Asia. It operates in two segments, Materials Solutions (MS) and Advanced Purity Solutions (APS). The MS segment provides materials-based solutions, such as chemical vapor and atomic layer deposition…

## Reported holders and securities, including exits (up to 20)

| Investor | Security | Instrument | Report period | Filed | Value | Quantity | Units | Change | Source |
|  --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |
| [Lone Pine Capital](https://ownershiptrace.com/13f/investors/71) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 0.00 USD | 0.000000 | Shares | exited | [Original filing](https://www.sec.gov/Archives/edgar/data/1061165/0000919574-26-005485-index.html) |
| [Cantillon Capital Management](https://ownershiptrace.com/13f/investors/87) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-07-29 00:00:00 | 17942114.00 USD | 99756.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1279936/0001279936-26-000005-index.html) |
| [Mairs & Power Funds](https://ownershiptrace.com/13f/investors/54) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 234112970.00 USD | 1301640.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1070134/0001172661-26-003496-index.html) |
| [Durable Capital Partners](https://ownershiptrace.com/13f/investors/42) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 52723981.00 USD | 293139.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1798849/0001798849-26-000010-index.html) |
| [Duquesne Family Office](https://ownershiptrace.com/13f/investors/30) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 21277000.00 USD | 118300.000000 | Shares | buy | [Original filing](https://www.sec.gov/Archives/edgar/data/1536411/0001536411-26-000006-index.html) |
| [GMO](https://ownershiptrace.com/13f/investors/94674) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-13 00:00:00 | 13059095.00 USD | 72607.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1352662/0001072613-26-000636-index.html) |
| [Bridgewater Associates](https://ownershiptrace.com/13f/investors/8) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 2198968.00 USD | 12226.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1350694/0001350694-26-000003-index.html) |
| [D.E. Shaw](https://ownershiptrace.com/13f/investors/98) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 5123132.00 USD | 28484.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1009207/0001104659-26-097217-index.html) |
| [Gotham Asset Management](https://ownershiptrace.com/13f/investors/94672) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 4991295.00 USD | 27751.000000 | Shares | add | [Original filing](https://www.sec.gov/Archives/edgar/data/1510387/0001398344-26-014644-index.html) |
| [GAMCO](https://ownershiptrace.com/13f/investors/137) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-12 00:00:00 | 3589286.00 USD | 19956.000000 | Shares | hold | [Original filing](https://www.sec.gov/Archives/edgar/data/807249/0001140361-26-032508-index.html) |
| [Torray Funds](https://ownershiptrace.com/13f/investors/76) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-07-30 00:00:00 | 3237660.00 USD | 18001.000000 | Shares | add | [Original filing](https://www.sec.gov/Archives/edgar/data/98758/0001193125-26-326274-index.html) |
| [First Eagle Investment Management](https://ownershiptrace.com/13f/investors/32) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-05 00:00:00 | 1717483.00 USD | 9549.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1325447/0001325447-26-000020-index.html) |
| [Maverick Capital](https://ownershiptrace.com/13f/investors/50) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 863508.00 USD | 4801.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/934639/0000947871-26-000793-index.html) |
| [Ancora Advisors / Ancora Holdings](https://ownershiptrace.com/13f/investors/101) | ENTEGRIS INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 31296.00 USD | 174.000000 | Shares | add | [Original filing](https://www.sec.gov/Archives/edgar/data/1446114/0001446114-26-000012-index.html) |

Public disclosures can be delayed, incomplete, or amended. Report period describes a position date; transaction date describes a reported transaction; filed describes submission. A recent filing or page update does not establish a current holding. A dash means unavailable or not comparable, not zero.

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