Canonical: https://ownershiptrace.com/13f/companies/1256

# Who owns ONTO INNOVATION INC. (ONTO)? Elite investor 13F holders

8 tracked elite investors reported holding ONTO INNOVATION INC as of 2026-06-30, including D.E. Shaw, Bridgewater Associates, GMO, Gotham Asset Management, First Eagle Investment Management. Who bought, trimmed or exited each quarter, with links to the original SEC 13F filings.

8 tracked investors currently reported holding · Latest report period: 2026-06-30 · Information Technology · Technology Hardware & Equipment

Onto Innovation Inc. engages in the design, development, manufacture, and support of process control tools that perform macro-defect inspection and metrology in the United States, Taiwan, South Korea, Japan, China, Southeast Asia, Asia, and Europe. The company offers lithography systems and process control analytical software; and automated and integrated metrology systems, silicon wafer…

## Reported holders and securities, including exits (up to 20)

| Investor | Security | Instrument | Report period | Filed | Value | Quantity | Units | Change | Source |
|  --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |
| [D.E. Shaw](https://ownershiptrace.com/13f/investors/98) | ONTO INNOVATION INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 140689544.00 USD | 371752.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1009207/0001104659-26-097217-index.html) |
| [Bridgewater Associates](https://ownershiptrace.com/13f/investors/8) | ONTO INNOVATION INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 37474119.00 USD | 99020.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1350694/0001350694-26-000003-index.html) |
| [GMO](https://ownershiptrace.com/13f/investors/94674) | ONTO INNOVATION INC | SHARE | 2026-06-30 | 2026-08-13 00:00:00 | 50039795.00 USD | 132223.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1352662/0001072613-26-000636-index.html) |
| [Gotham Asset Management](https://ownershiptrace.com/13f/investors/94672) | ONTO INNOVATION INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 48222099.00 USD | 127420.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1510387/0001398344-26-014644-index.html) |
| [First Eagle Investment Management](https://ownershiptrace.com/13f/investors/32) | ONTO INNOVATION INC | SHARE | 2026-06-30 | 2026-08-05 00:00:00 | 30008815.00 USD | 79294.000000 | Shares | add | [Original filing](https://www.sec.gov/Archives/edgar/data/1325447/0001325447-26-000020-index.html) |
| [Tudor Investment](https://ownershiptrace.com/13f/investors/94675) | ONTO INNOVATION INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 9275810.00 USD | 24510.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/923093/0000902664-26-003485-index.html) |
| [Maverick Capital](https://ownershiptrace.com/13f/investors/50) | ONTO INNOVATION INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 785284.00 USD | 2075.000000 | Shares | buy | [Original filing](https://www.sec.gov/Archives/edgar/data/934639/0000947871-26-000793-index.html) |
| [Ancora Advisors / Ancora Holdings](https://ownershiptrace.com/13f/investors/101) | ONTO INNOVATION INC | SHARE | 2026-06-30 | 2026-08-14 00:00:00 | 3406.00 USD | 9.000000 | Shares | reduce | [Original filing](https://www.sec.gov/Archives/edgar/data/1446114/0001446114-26-000012-index.html) |

Public disclosures can be delayed, incomplete, or amended. Report period describes a position date; transaction date describes a reported transaction; filed describes submission. A recent filing or page update does not establish a current holding. A dash means unavailable or not comparable, not zero.

This public summary shows the default reporting scope. Enable JavaScript for interactive filters, charts, and additional rows.

[How to read the data](https://ownershiptrace.com/docs#reading-the-data) · [Disclaimer](https://ownershiptrace.com/disclaimer)